Chatwin, Chris, Corbel, Serge and Young, Rupert (2002) Micro-engineering with lasers. In: Photon02, 2nd - 5th September, 2002, Cardiff International Arena.

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Abstract

Manufacture of ceramic Micro and Macro MEMS components using microstereolithography. After de-binding and sintering ceramic parts with relative densities of 95% were produced.

Item Type:	Conference or Workshop Item (Paper)
Keywords:	Micro Engineering, MEMS, Micro-fabrication, Microstereolithography, ceramics, photo-polymers, spatial light modulators, control systems
Schools and Departments:	School of Engineering and Informatics > Engineering and Design
Subjects:	Q Science Q Science > QA Mathematics > QA0075 Electronic computers. Computer science Q Science > QD Chemistry T Technology T Technology > TJ Mechanical engineering and machinery
Depositing User:	Chris Chatwin
Date Deposited:	29 Jun 2015 08:50
Last Modified:	29 Jun 2015 08:50
URI:	http://srodev.sussex.ac.uk/id/eprint/55005

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