Chatwin, Chris R (2017) Micro-Electro-Mechanical Systems (MEMS) technology. [Teaching Resource]

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Abstract

Lecture on Micro Elecrto-Mechanical Systems manufacture. Examples of its application to product manufacture are given.

Item Type:	Teaching Resource
Keywords:	Micro Electro-mechanical Systems, MEMS, MEMS devices, micro-turbomachinery, smart dust, motes, MEMS optical switches
Schools and Departments:	School of Engineering and Informatics > Engineering and Design
Research Centres and Groups:	Industrial Informatics and Signal Processing Research Group
Subjects:	T Technology > TA Engineering (General). Civil engineering (General) > TA0165 Engineering instruments, meters, etc. Industrial instrumentation T Technology > TA Engineering (General). Civil engineering (General) > TA0401 Materials of engineering and construction. Mechanics of materials T Technology > TA Engineering (General). Civil engineering (General) > TA1501 Applied optics. Photonics T Technology > TS Manufactures
Depositing User:	Chris Chatwin
Date Deposited:	19 Apr 2017 08:18
Last Modified:	19 Apr 2017 08:18
URI:	http://srodev.sussex.ac.uk/id/eprint/67419

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