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Chatwin, Chris R (2017) Micro-Electro-Mechanical Systems (MEMS) technology. [Teaching Resource]
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Official URL: http://sro.sussex.ac.uk
Abstract
Lecture on Micro Elecrto-Mechanical Systems manufacture. Examples of its application to product manufacture are given.
Item Type: | Teaching Resource |
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Keywords: | Micro Electro-mechanical Systems, MEMS, MEMS devices, micro-turbomachinery, smart dust, motes, MEMS optical switches |
Schools and Departments: | School of Engineering and Informatics > Engineering and Design |
Research Centres and Groups: | Industrial Informatics and Signal Processing Research Group |
Subjects: | T Technology > TA Engineering (General). Civil engineering (General) > TA0165 Engineering instruments, meters, etc. Industrial instrumentation T Technology > TA Engineering (General). Civil engineering (General) > TA0401 Materials of engineering and construction. Mechanics of materials T Technology > TA Engineering (General). Civil engineering (General) > TA1501 Applied optics. Photonics T Technology > TS Manufactures |
Depositing User: | Chris Chatwin |
Date Deposited: | 19 Apr 2017 08:18 |
Last Modified: | 19 Apr 2017 08:18 |
URI: | http://srodev.sussex.ac.uk/id/eprint/67419 |
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