EDL_Varactor_clean revised manuscript.pdf (14.01 MB)
Geometry-based tunability enhancement of flexible thin-film varactors
journal contribution
posted on 2023-06-09, 07:31 authored by S Knobelspies, C Gonnelli, C Vogt, A Daus, Niko Munzenrieder, G TrösterIn this letter, flexible voltage-controlled capacitors (varactors) based on an amorphous Indium–Gallium–Zinc–Oxide (a-IGZO) semiconductor are presented. Two different varactor designs and their influence on the capacitance tuning characteristics are investigated. The first design consists of a top electrode finger structure which yields a maximum capacitance tunability of 6.9 at 10 kHz. Second, a novel interdigitated varactor structure results in a maximum tunability of 93.7 at 100 kHz. The design- and frequency-dependencies of the devices are evaluated through C–V measurements. Furthermore, we show bending stability of the devices down to a tensile radius of 6 mm without altering the performance. Finally, a varactor is combined with a thin-film resistor to demonstrate a tunable RC-circuit for impedance matching and low-pass filtering applications. The device fabrication flow and material stack are compatible with standard flexible thin-film transistor fabrication which enables parallel implementation of analog or logic circuitry and varactor devices.
History
Publication status
- Published
File Version
- Accepted version
Journal
IEEE Electron Device LettersISSN
0741-3106Publisher
IEEEExternal DOI
Issue
8Volume
38Page range
1117-1120Department affiliated with
- Engineering and Design Publications
Research groups affiliated with
- Sensor Technology Research Centre Publications
Notes
© 2017 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.Full text available
- Yes
Peer reviewed?
- Yes
Legacy Posted Date
2017-08-02First Open Access (FOA) Date
2017-08-02First Compliant Deposit (FCD) Date
2017-08-02Usage metrics
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